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 JUPITER

Equipment for 3D ion implantation  

Vacuum chamber&vacuum supply system Power supply Control unit
  • Vacuum systems, based on turbo molecular pump(1500l/s).
  • 2-channel gas injection system. 
  • Water cooled ceramic high voltage current feedthrugh.
  • Computer operating 
  • Output voltage 10-60 kV. 
  • Power up to  4kW. 
  • Impulse duration 80mks-2ms. 
  • Frequency up to 200 Hz. 
  • Short circuit protection system.
  • Computer operating. 
  • HV Power Supply Control Unit
  • Vacuum System Control Unit
  • Gas Supply Control Unit
  • Cooling System Control Unit
  • Turbopump Power Supply
  • PC interface block

 

 
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